DIADIUN, K. V. SYSTEM FOR CONTROLLING MASS BALANCE OF GASES AND REAGENTS DURING FORMATION OF ION-PLASMA COATINGS . Scientific notes of Junior Academy of Sciences of Ukraine, [S. l.], n. 1(17), p. 67–75, 2021. DOI: 10.51707/2618-0529-2020-17-08. Disponível em: https://snman.science/index.php/sn/article/view/47. Acesso em: 19 dec. 2024.